Verify cooling water valves are open and flow switches are satisfied.
) to remove process by-product build-up from chamber walls. This guide details the installation, specifications, and maintenance protocols required for safe operation. 🛠️ System Overview and Key Specifications
The official manual is your go-to source for specifications, setup, operation, and safety. Here’s where to look:
: Unlike duty-cycle limited systems, the Astron series is designed for 100% duty cycle (CW), supporting long cleaning processes without downtime. No Argon Required
Ensure adequate water flow to prevent overheating of the plasma tube. Gas Lines: Utilize high-purity piping for process gases.
Visually inspect all gas connections for signs of discoloration or corrosion.
To maintain high accuracy, the MKS Astron 2L and its sensors require periodic calibration, especially after exposure to process contaminants. Zero and Atmosphere Adjustments
Verify setpoint relay operations against an independent master gauge.
Never operate the source dry or with restricted water flow. Connect the cooling lines to a facility chiller loop capable of sustaining a stable 2.0 GPM flow rate. The system contains internal thermal sensors linked directly to the main power interlock to shut down RF generation if temperatures exceed safe operational thresholds. Operational Sequences